Close
Enter your search into one or more of the boxes below:
You can refine your search by selecting from any of the options below:
Search
Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration (Paperback)

£109.99
Usually despatched within 2 weeks.
Order now for Free delivery in the UK.
More on delivery...

Synopsis

Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost.

Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology.

We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 m-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution. The optimization of its selectivity towards aluminum is largely demonstrated.

The second part focuses on sensors design and characteristics. A novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process. High thermal uniformity, low power consumption and high working temperature are confirmed by extensive measurements. The additional gas flow sensing layers are judiciously chosen and implemented. Measurements in the presence of a nitrogen flow and gas reveal fair sensitivity on a large flow velocity range as well as good response to many gases. Finally, MOS transistors suspended on released dielectric membranes are presented and fully characterized as a concluding demonstrator of the co-integration in SOI technology.

More books by Jean Laconte

More books by Denis Flandre

More books by Jean-Pierre Raskin

Leave Review

Delivery

Delivery Options

All delivery times quoted are the average, and cannot be guaranteed. These should be added to the availability message time, to determine when the goods will arrive. During checkout we will give you a cumulative estimated date for delivery.

Location 1st Book Each additional book Average Delivery Time
UK Standard Delivery FREE FREE 3-5 Days
UK First Class £4.50 £1.00 1-2 Days
UK Courier £7.00 £1.00 1-2 Days
Western Europe** Courier £17.00 £3.00 2-3 Days
Western Europe** Airmail £5.00 £1.50 4-14 Days
USA / Canada Courier £20.00 £3.00 2-4 Days
USA / Canada Airmail £7.00 £3.00 4-14 Days
Rest of World Courier £22.50 £3.00 3-6 Days
Rest of World Airmail £8.00 £3.00 7-21 Days

** Includes Austria, Belgium, Denmark, France, Germany, Greece, Iceland, Irish Republic, Italy, Luxembourg, Netherlands, Portugal, Spain, Sweden and Switzerland.

Delivery Help & FAQs

Returns Information

If you are not completely satisfied with your purchase*, you may return it to us in its original condition with in 30 days of receiving your delivery or collection notification email for a refund. Except for damaged items or delivery issues the cost of return postage is borne by the buyer. Your statutory rights are not affected.

* For Exclusions and terms on damaged or delivery issues see Returns Help & FAQs

You might also like

Modeling Nanowire and Double-Gate...
(Hardback)
Farzan Jazaeri; Jean-Michel Sallese
 
 
£110.00
 
Landau Fermi Liquids and Beyond
(Hardback)
V. Tripathi
 
 
£100.00
 
An Introduction to Quantum Transport...
(Hardback)
David K. Ferry
 
 
£95.00
 
A Primer to the Theory of Critical...
(Paperback)
Jurgen M. Honig; Jozef Spalek
 
 
£30.99
 
Latest Blog
A Tale of Two Currencies
23/02/2018

Dharshini David explains why the volatility of Bitcoin underscores how secure the dollar is in its pole position – and how the old greenback continues to dictate the world’s fortunes.

#FoylesFive: Polish Fiction
22/02/2018

Gary from our Fiction Department delights us with a few of his favourite Polish novels.

Get More!
22/02/2018

We've extended the range of available lines on our website to close to one million items across more than thirty product categories! OK, that actually sounds quite dull. But what it means is you've got more books to choose from, more subject areas, more titles available on our website than ever before — more more more! To celebrate, we're giving you 15% off everything* online when you use the code GETMORE at checkout anytime between Thursday 22nd February and Thursday 1st March 2018.

View all Blog Entries
Twitter
Show/Hide Tweets
© W&G Foyle Ltd