
Nanolithography and Nanofabrication Using Hydrogen Silsesquioxane Resists
Paperback Published on: 01/09/2011
£59.00
Synopsis
- Publisher: Proquest, Umi Dissertation Publishing
- ISBN: 9781243618702
- Number of pages: 116
- Weight: 222g
- Dimensions: 246 x 189 x 6 mm