Laser and Particle-beam Chemical Processing for Microelectronics: Volume 101

Laser and Particle-beam Chemical Processing for Microelectronics: Volume 101

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Hardback Published on: 01/04/1988
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Synopsis

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Publisher information

  • Publisher: Materials Research Society
  • ISBN: 9780931837692
  • Dimensions: 228 x 152 x 30 mm
  • Weight: 880g

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