Laser and Particle-Beam Chemical Processing for Microelectronics: Volume 101
Daniel J. Ehrlich (editor), D. J. Ehrlich (editor), Gregg S. Higashi (editor), Modest M. Oprysko (editor)
Paperback Published on: 05/06/2014
Price: £22.00
Synopsis
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Publisher information
- Publisher: Cambridge University Press
- ISBN: 9781107411043
- Dimensions: 229 x 152 x 27 mm
- Weight: 710g


















